Gettering and Defect Engineering in Semiconductor Technology XIII - GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Dölnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009
- Författare
- H. Richter Martin Kittler Germany) International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" 2009 : Dölnsee-Schorfheide
- (Edited by M. Kittler and H. Richter., Includes bibliographical references and index.)
- Genre
- Ej skönlitteratur, Konferenser, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Trans Tech Publications | 2010 | Schweiz, Stafa-Zuerich | xiv, 592 sidor illustrationer 25 cm. | 978-3-908451-74-7 |